SHAPAL™ Aluminum nitride ceramics
ジョイカジノ 系列 is Tokuyama's line of ceramic products, which are made by sintering aluminum nitride powder. ジョイカジノ 系列 has excellent thermal conductivity, strong resistance to halogen gas plasma, and a coefficient of thermal expansion similar to silicon. These properties are made use of in a wide range of applications, including components that require effective heat dissipation and components for semiconductor production equipment.
Product overview
Generic names |
Aluminum nitride ceramics |
Chemical formula |
AlN |
Special properties |
- High purity
- High rate of thermal conductivity
- Excellent electrical insulation
- High degree of strength
- High corrosion resistance
- Transparent
- Strong resistance to halogen gas plasma
- Low thermal expansion properties
|
General applications |
- Power devices
- LD and LED heat sinks
- Semiconductor production equipment
|
Product lineup |
- SHAPAL™ SH-30
Ceramics with a high level of strength and a thickness of 1 millimeter or thinner Applications: Power devices; LD and LED heat sinks
- SHAPAL™ SH-15
Ceramics with high thermal conductivity and a thickness of 2 millimeters or thinner Applications: Semiconductor production equipment; various other usages
- SHAPAL™ SH-50
Ceramics with a high degree of purity (free of auxiliary additives) and a thickness of 2 millimeters or thinner Applications: Semiconductor production equipment; prevention of internal pollution to machinery from metallic impurities; various other usages
|
Properties |
Units |
SH-30 |
SH-15 |
SH-50 |
General properties |
Density |
g/cm2 |
3.34 |
3.33 |
3.24 |
Electrical properties |
Volume resistivity |
Ω/㎝ |
8.4×1013 |
1.1×1014 |
3.1×1013 |
Dielectric constant |
RT,1MHz |
|
9.1 |
9.1 |
8.9 |
Dielectric loss |
RT,1MHz |
|
2.5×10-4 |
3.0×10-4 |
2.6×10-4 |
Withstand Voltage |
kV/mm |
36.7 |
31.3 |
18.7 |
Thermal properties |
Thermal conductivity |
20oC |
W/(m.k) |
174 |
184 |
86 |
Mechanical properties |
Bending strength |
Mpa |
511 |
357 |
356 |
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